Tutunjyan, NinaNinaTutunjyanSardo, StefanoStefanoSardoDe Vos, JoeriJoeriDe VosVan Huylenbroeck, StefaanStefaanVan HuylenbroeckJourdain, AnneAnneJourdainPeng, LanLanPengInoue, FumihiroFumihiroInoueRassoul, NouredineNouredineRassoulBeyer, GeraldGeraldBeyerBeyne, EricEricBeyneMiller, AndyAndyMillerPiumi, DanieleDanielePiumiWalsby, EdwardEdwardWalsbyAnsell, OliverOliverAnsellAshraf, HumaHumaAshrafThomas, DaveDaveThomas2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29608Etch process modules development and integration in 3D SOC applicationsMeeting abstract