VLSI compatible SiON finFET sensors for biosensing applications: 2D/3D TCAD simulations and experimental verification of pH dependency

Santermans, SybrenSybrenSantermansMartens, KoenKoenMartensHellings, GeertGeertHellingsRuic, DinoDinoRuicGupta, MihirMihirGuptaVan Roy, WimWimVan RoyDu Bois, BertBertDu BoisSeveri, SimoneSimoneSeveriHeyns, MarcMarcHeyns2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33937VLSI compatible SiON finFET sensors for biosensing applications: 2D/3D TCAD simulations and experimental verification of pH dependencyMeeting abstract