Suh, Hyo SeonHyo SeonSuhDudash, ViktorViktorDudashLorusso, GianGianLorussoHer, YoungJunYoungJunHerLi, JinJinLiMonreal, VictorVictorMonrealBaskaran, DurairajDurairajBaskaranALPERSON, BOAZBOAZALPERSONSKJONNEMAND, KARLKARLSKJONNEMANDMack, ChrisChrisMack2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/36029Roughness study on line and space patterning with chemo-epitaxy directed self-assemblyProceedings paperhttps://doi.org/10.1117/12.2552354