Interface characterization of nanoscale laminate structures on dense dielectric substrates by X-ray reflectivity

Travaly, YoussefYoussefTravalySchuhmacher, JorgJorgSchuhmacherMartin Hoyas, AnaAnaMartin HoyasVan Hove, MarleenMarleenVan HoveMaex, KarenKarenMaexAbell, ThomasThomasAbellSutcliffe, VictorVictorSutcliffeJonas, Alain M.Alain M.Jonas2021-10-162021-10-162005-04https://imec-publications.be/handle/20.500.12860/11333Interface characterization of nanoscale laminate structures on dense dielectric substrates by X-ray reflectivityJournal article