In-situ SEM observation of electromigration in thin metal films at accelerated stress conditions

D'Haen, JanJanD'HaenVan Olmen, JanJanVan OlmenBeelen, Z.Z.BeelenManca, JeanJeanMancaMartens, T.T.MartensDe Ceuninck, WardWardDe CeuninckD'Olieslaeger, MarcMarcD'OlieslaegerSchepper, L.L.SchepperCannaerts, M.M.CannaertsMaex, KarenKarenMaex2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4228In-situ SEM observation of electromigration in thin metal films at accelerated stress conditionsJournal article