A study in interactions of plasmas and wet cleans with ULK materials

Xu, KaidongKaidongXuVereecke, GuyGuyVereeckeKesters, ElsElsKestersLe, Quoc ToanQuoc ToanLeLux, MarcelMarcelLuxKraus, HaraldHaraldKrausHenry, Sally - AnnSally - AnnHenryArcher, L.L.ArcherGaulhofer, E.E.GaulhoferKovacs, F.F.KovacsDalmer, M.M.DalmerMertens, PaulPaulMertensLuo, S. JS. JLuoHan, Q. YQ. YHan2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13241A study in interactions of plasmas and wet cleans with ULK materialsProceedings paper