Xu, XiuMeiXiuMeiXuVereecke, GuyGuyVereeckeVan den Hoogen, ErikErikVan den HoogenSmeers, JensJensSmeersArmini, SilviaSilviaArminiDelande, TinneTinneDelandeStruyf, HerbertHerbertStruyf2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21871Wetting challenges in cleaning of high aspect ratio nano-structuresMeeting abstract