Popovici, Mihaela IoanaMihaela IoanaPopoviciDelabie, AnneliesAnneliesDelabieAdelmann, ChristophChristophAdelmannMarcoen, KristofKristofMarcoenGroven, BenjaminBenjaminGrovenSwerts, JohanJohanSwertsMeersschaut, JohanJohanMeersschautFranquet, AlexisAlexisFranquetRedolfi, AugustoAugustoRedolfiJurczak, GosiaGosiaJurczakVan Elshocht, SvenSvenVan Elshocht2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24395Impact of the starting surface on the film characteristics of thermal Ru ALD for metal-insulator-metal applicationsProceedings paperhttp://www.ald2014.org/pdf/ALD2014Program_V4.pdf