Micro-Transfer Printing for Heterogeneous Si Photonic Integrated Circuits

Roelkens, GuntherGuntherRoelkensZhang, JingJingZhangBogaert, LaurensLaurensBogaertBillet, MaximilienMaximilienBilletWang, DongboDongboWangPan, BiweiBiweiPanKruckel, ClemensClemensKruckelSoltanian, EmadEmadSoltanianMaes, DennisDennisMaesVanackere, TomTomVanackereVandekerckhove, TomTomVandekerckhoveCuyvers, StijnStijnCuyversDe Witte, JasperJasperDe WitteLuntadila Lufungula, IsaacIsaacLuntadila LufungulaGuo, XinXinGuoLi, HeHeLiQin, SenbiaoSenbiaoQinMuliuk, GrigorijGrigorijMuliukUvin, SarahSarahUvinHaq, BahawalBahawalHaqop de Beeck, CamielCamielop de BeeckGoyvaerts, JeroenJeroenGoyvaertsLepage, GuyGuyLepageVerheyen, PeterPeterVerheyenVan Campenhout, JorisJorisVan CampenhoutMorthier, GeertGeertMorthierKuyken, BartBartKuykenVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2023-02-222023-01-212023-02-2220231077-260XWOS:000907566100001https://imec-publications.be/handle/20.500.12860/41002Micro-Transfer Printing for Heterogeneous Si Photonic Integrated CircuitsJournal article10.1109/JSTQE.2022.3222686WOS:000907566100001SILICONPHOTODIODESEFFICIENT