An analytic method to compute the stress dependence on the dimensions and its influence in the characteristics of triple gate devices

Trevisoli, R.D.R.D.TrevisoliMartino, J.A.J.A.MartinoSimoen, EddyEddySimoenClaeys, CorCorClaeysPavanello, M.A.M.A.Pavanello2021-10-202021-10-2020120026-2714https://imec-publications.be/handle/20.500.12860/21634An analytic method to compute the stress dependence on the dimensions and its influence in the characteristics of triple gate devicesJournal article