Ferroelectric Switching in FEFET: Physics of the Atomic Mechanism and Switching Dynamics in HfZrOx, HfO2 with Oxygen Vacancies and Si dopants

Clima, SergiuSergiuClimaO'Sullivan, BarryBarryO'SullivanRonchi, NicoloNicoloRonchiGarcia Bardon, MarieMarieGarcia BardonBanerjee, KaustuvKaustuvBanerjeeVan den Bosch, GeertGeertVan den BoschPourtois, GeoffreyGeoffreyPourtoisVan Houdt, JanJanVan Houdt2022-01-102021-12-062022-01-1020202380-9248WOS:000717011600218https://imec-publications.be/handle/20.500.12860/38557Ferroelectric Switching in FEFET: Physics of the Atomic Mechanism and Switching Dynamics in HfZrOx, HfO2 with Oxygen Vacancies and Si dopantsProceedings paper10.1109/IEDM13553.2020.9372117978-1-7281-8888-1WOS:000717011600218