Leray, PhilippePhilippeLerayMao, MingMingMaoBaudemprez, BartBartBaudemprezAmir, NurielNurielAmir2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25528Overlay metrology solutions in a triple patterning schemeProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2212056