Tierno, DavideDavideTiernoCiofi, IvanIvanCiofiParvais, BertrandBertrandParvaisCroes, KristofKristofCroesVarela Pedreira, OlallaOlallaVarela Pedreira2023-08-092023-08-072023-08-082023-08-0920232380-632XWOS:001027381700019https://imec-publications.be/handle/20.500.12860/42295Exploring the Benefits of Cryogenic Temperatures for Co and Ru MetallizationsProceedings paper10.1109/IITC/MAM57687.2023.10154717979-8-3503-1097-9WOS:001027381700019RESISTANCERESISTIVITY