The ADEQUAT project for development and transfer of 0.25µm logic complementary metal-oxide-semiconductor modules

De Keersmaecker, RogerRogerDe KeersmaeckerDeclerck, GilbertGilbertDeclerckFélix, P.P.FélixHaond, M.M.HaondHill, C.C.HillJanssen, G.G.JanssenLorenz, J.J.LorenzMaes, HermanHermanMaesMontree, AndreAndreMontreeNeppl, F.F.NepplPatruno, P.P.PatrunoRudan, M.M.RudanRyssel, H.H.RysselVan den hove, LucLucVan den hoveVandervorst, WilfriedWilfriedVandervorstvan Ommen, A.A.van Ommen2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/113The ADEQUAT project for development and transfer of 0.25µm logic complementary metal-oxide-semiconductor modulesJournal article