Au-free, high-breakdown AlGaN/GaN MISHEMTs with low leakage, high yield and robust TDDB characteristics

Lenci, SilviaSilviaLenciKang, XuanwuXuanwuKangWellekens, DirkDirkWellekensVan Hove, MarleenMarleenVan HoveBoulay, SanaeSanaeBoulayStoffels, SteveSteveStoffelsGeens, KarenKarenGeensZahid, MohammedMohammedZahidDecoutere, StefaanStefaanDecoutere2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20997Au-free, high-breakdown AlGaN/GaN MISHEMTs with low leakage, high yield and robust TDDB characteristicsProceedings paper