Redefining 2-Level Semi-Damascene Interconnect Technology: Benchmarking three different Fully Self-aligned Via options

Marti, GiulioGiulioMartiDelie, GillesGillesDelieMurdoch, GayleGayleMurdochGupta, AnshulAnshulGuptaKundu, SouvikSouvikKunduDecoster, StefanStefanDecosterVarela Pedreira, OlallaOlallaVarela PedreiraLesniewska, AlicjaAlicjaLesniewskaHermans, YannickYannickHermansKenens, BartBartKenensUlu Okudur, FulyaFulyaUlu OkudurPark, SeonghoSeonghoParkTokei, ZsoltZsoltTokei2025-06-052025-03-062025-06-052024979-8-3503-8518-22380-632XWOS:001411360600041https://imec-publications.be/handle/20.500.12860/45341Redefining 2-Level Semi-Damascene Interconnect Technology: Benchmarking three different Fully Self-aligned Via optionsProceedings paper10.1109/IITC61274.2024.10732570979-8-3503-8517-5WOS:001411360600041