O'Sullivan, BarryBarryO'SullivanMitsuhashi, RiichirouRiichirouMitsuhashiIto, SatoruSatoruItoOikawa, KotaKotaOikawaKubicek, StefanStefanKubicekParaschiv, VasileVasileParaschivAdelmann, ChristophChristophAdelmannVeloso, AnabelaAnabelaVelosoYu, HongYuHongYuYuSchram, TomTomSchramBiesemans, SergeSergeBiesemansNakabayashi, TakashiTakashiNakabayashiIkeda, AtsushiAtsushiIkedaNiwa, MasaakiMasaakiNiwa2021-10-172021-10-1720080741-3106https://imec-publications.be/handle/20.500.12860/14260Work-function engineering for 32nm node pMOS devices: high-performance TaCNO-gated filmsJournal article