Ueda, NaoNaoUedaRoda Neve, CesarCesarRoda NeveDetalle, MikaelMikaelDetalleBeyne, EricEricBeyneVan der Plas, GeertGeertVan der PlasNagata, MakotoMakotoNagata2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/26022Broadband metal-insulator-metal capacitors on silicon interposer for low impedance power distribution networkMeeting abstract