Process-induced degradation of SiO2 and a-Si:H passivation layers for photovoltaic applications

O'Sullivan, BarryBarryO'SullivanBearda, TwanTwanBeardaNadupalli, ShankariShankariNadupalliLabie, RietRietLabieBaert, KrisKrisBaertGordon, IvanIvanGordonPoortmans, JefJefPoortmans2021-10-222021-10-2220142156-3381https://imec-publications.be/handle/20.500.12860/24353Process-induced degradation of SiO2 and a-Si:H passivation layers for photovoltaic applicationsJournal articlehttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6834759&queryText%3DProcess+induced+degradation+of+SiO2+and+a-Si%