A silicon micromachined magnetic actuator using a two layer electroplating process

De Bruyker, DirkDirkDe BruykerChévrier, Jean-BaptisteJean-BaptisteChévrierBaert, KrisKrisBaertPuers, BobBobPuersLowe, H.H.Lowe2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1155A silicon micromachined magnetic actuator using a two layer electroplating processProceedings paper