Zero and one-dimensional electrical characterization of nanometer-wide Si fins

Folkersma, StevenStevenFolkersmaBogdanowicz, JanuszJanuszBogdanowiczSchulze, AndreasAndreasSchulzeFavia, PaolaPaolaFaviaFranquet, AlexisAlexisFranquetSpampinato, ValentinaValentinaSpampinatoPetersen, DirchDirchPetersenHansen, OleOleHansenHenrichsen, HenrikHenrikHenrichsenNielsen, PeterPeterNielsenShiv, LiorLiorShivVandervorst, WilfriedWilfriedVandervorst2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30721Zero and one-dimensional electrical characterization of nanometer-wide Si finsMeeting abstracthttps://www.iit2018.org/content/dam/iisb/iit2018/documents/2018-08-06-program-iit-2018.pdf