Solid phase epitaxy versus random nucleation and growth in sub-20 nm wide fin field-effect transistors

Duffy, RayRayDuffyVan Dal, MarkMarkVan DalPawlak, BartekBartekPawlakKaiser, M.M.KaiserWeemaes, R.G.R.R.G.R.WeemaesDegroote, BartBartDegrooteKunnen, EddyEddyKunnenAltamirano Sanchez, EfrainEfrainAltamirano Sanchez2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12107Solid phase epitaxy versus random nucleation and growth in sub-20 nm wide fin field-effect transistorsJournal article