Advantage of in-situ over ex-situ techniques as reliability tool: aging kinetics of IMEC's MCM-D discrete passives devices

Soussan, PhilippePhilippeSoussanLekens, GeertGeertLekensDreesen, R.R.DreesenDe Ceuninck, WardWardDe CeuninckBeyne, EricEricBeyne2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8176Advantage of in-situ over ex-situ techniques as reliability tool: aging kinetics of IMEC's MCM-D discrete passives devicesJournal article