Zhao, ChaoChaoZhaoRichard, OlivierOlivierRichardBender, HugoHugoBenderYoung, EdwardEdwardYoungCarter, RichardRichardCarterTsai, WilmanWilmanTsaiCaymax, MattyMattyCaymaxDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsRoebben, G.G.RoebbenVan der Biest, O.O.Van der BiestMaes, JosJosMaesTuominen, MarkoMarkoTuominenHaukka, S.S.Haukka2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5877Stabilization of amorphous structures in ALCVD high-k oxide layersOral presentation