Mertens, PaulPaulMertensJanssens, TomTomJanssensHolsteyns, FrankFrankHolsteynsZijlstra, AaldertAaldertZijlstraHalder, SandipSandipHalderWostyn, KurtKurtWostynAndreas, MichaelMichaelAndreasHoyer, RonaldRonaldHoyerBarbagini, FrancescaFrancescaBarbaginiWada, MasayukiMasayukiWadaFranklin, ColeColeFranklinKim, Tae-GonTae-GonKimKim, KKKimKenis, KarineKarineKenisLe, Quoc ToanQuoc ToanLeClaes, MartineMartineClaesKesters, ElsElsKestersVos, RitaRitaVosVereecke, GuyGuyVereeckeBearda, TwanTwanBeardaHeyns, MarcMarcHeyns2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14158Acoustic cleaning in nano-electronicsProceedings paper