McGilvery, C.M.C.M.McGilveryMcFadzean, S.S.McFadzeanDocherty, F.T.F.T.DochertyCraven, A.J.A.J.CravenMcComb, D.W.D.W.McCombDe Gendt, StefanStefanDe Gendt2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12568Nucleation, crystallization and phase segregation in HfO2 and HfSiOProceedings paper