Heterogeneous integration of III-V semiconductors and silicon for optical systems-on-a-chip

Roelkens, GuntherGuntherRoelkensBrouckaert, JoostJoostBrouckaertDumon, PieterPieterDumonBogaerts, WimWimBogaertsVan Thourhout, DriesDriesVan Thourhout2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11111Heterogeneous integration of III-V semiconductors and silicon for optical systems-on-a-chipProceedings paper