van der Veen, MarleenMarleenvan der VeenJourdan, NicolasNicolasJourdanVega Gonzalez, VictorVictorVega GonzalezVandersmissen, KevinKevinVandersmissenWilson, ChrisChrisWilsonVarela Pedreira, OlallaOlallaVarela PedreiraBoemmels, JuergenJuergenBoemmelsStruyf, HerbertHerbertStruyfTokei, ZsoltZsoltTokei2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29664Trends in scaling the Cu metallizationMeeting abstract