Atomic layer deposition of Gd2O3 and Sc2O3 on In0.53Ga0.47As: Interfacial layer engineering

Ameen, MahmoudMahmoudAmeenNyns, LauraLauraNynsLin, DennisDennisLinIvanov, TsvetanTsvetanIvanovConard, ThierryThierryConardMeersschaut, JohanJohanMeersschautSioncke, SonjaSonjaSionckeFeteha, MohamedMohamedFetehaVan Elshocht, SvenSvenVan ElshochtDelabie, AnneliesAnneliesDelabie2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23486Atomic layer deposition of Gd2O3 and Sc2O3 on In0.53Ga0.47As: Interfacial layer engineeringMeeting abstract