Heyns, MarcMarcHeynsBender, HugoHugoBenderCaymax, MattyMattyCaymaxCarter, RRCarterClaes, MartineMartineClaesConard, ThierryThierryConardBoullart, WernerWernerBoullartDe Gendt, StefanStefanDe GendtDegraeve, RobinRobinDegraeveDeweerd, WimWimDeweerdGroeseneken, GuidoGuidoGroesenekenHoussa, MichelMichelHoussaKubicek, StefanStefanKubicekLujan, GuilhermeGuilhermeLujanNohira, H.H.NohiraPantisano, LuigiLuigiPantisanoPetry, JasmineJasminePetryRöhr, ErikaErikaRöhrVandervorst, WilfriedWilfriedVandervorstVan Elshocht, SvenSvenVan ElshochtXu, ZhenZhenXuZhao, ChaoChaoZhaoCartier, E.E.CartierChen, J.J.ChenCosnier, V.V.CosnierGreen, M.M.GreenJang, S.E.S.E.JangKaushik, VidyaVidyaKaushikKerber, A.A.KerberKluth, J.J.KluthLin, S.S.LinTsai, WilmanWilmanTsaiYoung, EdwardEdwardYoungManabe, Y.Y.Manabe2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6389Issues, achievements and challenges towards intergration of high-k dielectricsProceedings paper