Improving mechanical robustness of ultra-low-k SiOCH PECVD materials

Urbanowicz, AdamAdamUrbanowiczVanstreels, KrisKrisVanstreelsVerdonck, PatrickPatrickVerdonckShamiryan, DenisDenisShamiryanDe Gendt, StefanStefanDe GendtBaklanov, MikhaïlMikhaïlBaklanov2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18117Improving mechanical robustness of ultra-low-k SiOCH PECVD materialsOral presentationhttp://www.malab.com/stress_workshop_2010/