Gencarelli, FedericaFedericaGencarelliShimura, YosukeYosukeShimuraKumar, ArulArulKumarVincent, BenjaminBenjaminVincentMoussa, AlainAlainMoussaVanhaeren, DanielleDanielleVanhaerenRichard, OlivierOlivierRichardBender, HugoHugoBenderVandervorst, WilfriedWilfriedVandervorstCaymax, MattyMattyCaymaxLoo, RogerRogerLooHeyns, MarcMarcHeyns2021-10-222021-10-2220150040-6090https://imec-publications.be/handle/20.500.12860/25303Amorphous inclusions during Ge and GeSn epitaxial growth via chemical vapor depositionJournal articlehttp://www.sciencedirect.com/science/article/pii/S0040609015007464