Use of high order precursors for manufacturing gate all around devices

Hikavyy, AndriyAndriyHikavyyMertens, HansHansMertensWitters, LiesbethLiesbethWittersLoo, RogerRogerLooHoriguchi, NaotoNaotoHoriguchi2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26724Use of high order precursors for manufacturing gate all around devicesProceedings paper