Kittl, JorgeJorgeKittlOpsomer, KarlKarlOpsomerTorregiani, CristinaCristinaTorregianiDemeurisse, CarolineCarolineDemeurisseMertens, SofieSofieMertensBrunco, DavidDavidBruncoVan Dal, MarkMarkVan DalLauwers, AnneAnneLauwers2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13954Silicides and Germanides for Nano-CMOS ApplicationsJournal article