Eneman, GeertGeertEnemanBargallo Gonzalez, MireiaMireiaBargallo GonzalezHellings, GeertGeertHellingsDe Jaeger, BriceBriceDe JaegerWang, GangGangWangMitard, JeromeJeromeMitardDe Meyer, KristinKristinDe MeyerClaeys, CorCorClaeysMeuris, MarcMarcMeurisHeyns, MarcMarcHeynsHoffmann, Thomas Y.Thomas Y.HoffmannSimoen, EddyEddySimoen2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17074Trap-assisted tunneling in deep-submicron Ge PFET junctionsProceedings paper