Nyns, LauraLauraNynsDelabie, AnneliesAnneliesDelabiePourtois, GeoffreyGeoffreyPourtoisVan Elshocht, SvenSvenVan ElshochtVinckier, ChrisChrisVinckierDe Gendt, StefanStefanDe Gendt2021-10-182021-10-1820100013-4651https://imec-publications.be/handle/20.500.12860/17718Study of the surface reactions in ALD hafnium aluminatesJournal article