Effects of mechanical stress on polycrystalline-silicon resistors

Nakabayashi, M.M.NakabayashiOhyama, HidenoriHidenoriOhyamaSimoen, EddyEddySimoenIkegami, M.M.IkegamiClaeys, CorCorClaeysKobayashi, K.K.KobayashiYoneoka, M.M.YoneokaMiyahara, K.K.Miyahara2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6636Effects of mechanical stress on polycrystalline-silicon resistorsJournal article