Boher, P.P.BoherDefranoux, C.C.DefranouxHeinrich, P.P.HeinrichWolstenholme, J.J.WolstenholmeBender, HugoHugoBender2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7238Vacuum UV spectroscopic ellipsometry applied to the characterization of high-k dielectricsOral presentation