Ni(Pt)Si thermal stability improvement by carbon implantation

Mertens, SofieSofieMertensHoffmann, Thomas Y.Thomas Y.HoffmannVrancken, ChristaChristaVranckenJakschik, S.S.JakschikRichard, OlivierOlivierRichardBender, HugoHugoBenderVandervorst, WilfriedWilfriedVandervorstAbsil, PhilippePhilippeAbsilLauwers, AnneAnneLauwers2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14165Ni(Pt)Si thermal stability improvement by carbon implantationMeeting abstract