Vesters, YannickYannickVestersJiang, JingJingJiangYamamoto, HirokiHirokiYamamotoDe Simone, DaniloDaniloDe SimoneKozawa, TakahiroTakahiroKozawaDe Gendt, StefanStefanDe GendtVandenberghe, GeertGeertVandenberghe2021-10-272021-10-272019-121932-5150https://imec-publications.be/handle/20.500.12860/34389Sensitizers in extreme ultraviolet chemically amplified resists: mechanism of sensitivity improvementJournal articlehttps://doi.org/10.1117/1.JMM.17.4.043506