Influence of oxygen on the analysis of oxynitrides: N-diffusion or ionization?

De Witte, HildeHildeDe WitteConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4286Influence of oxygen on the analysis of oxynitrides: N-diffusion or ionization?Oral presentation