A deep level transient spectroscopy comparison of the SiO2/Si and Al2O3/Si interface states

Simoen, EddyEddySimoenRothschild, AudeAudeRothschildVermang, BartBartVermangPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19796A deep level transient spectroscopy comparison of the SiO2/Si and Al2O3/Si interface statesProceedings paper