Low damage ultra-low-k patterning using a high boiling point organic (HBPO) combined with NF3

Chanson, RomainRomainChansonTahara, ShigeruShigeruTaharaVanstreels, KrisKrisVanstreelsde Marneffe, Jean-FrancoisJean-Francoisde Marneffe2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30389Low damage ultra-low-k patterning using a high boiling point organic (HBPO) combined with NF3Journal articlehttp://iopscience.iop.org/article/10.1088/2516-1067/aad92e/meta