Etching of tungsten via a combination of thermal oxide formation and wet-chemical oxide dissolution

Pacco, AntoineAntoinePaccoNakano, TeppeiTeppeiNakanoLoyo Prado, JanaJanaLoyo PradoLai, Ju-GengJu-GengLaiKawarazaki, HikaruHikaruKawarazakiAltamirano Sanchez, EfrainEfrainAltamirano Sanchez2025-07-312025-01-162025-07-3120250167-9317WOS:001392636300001https://imec-publications.be/handle/20.500.12860/45085Etching of tungsten via a combination of thermal oxide formation and wet-chemical oxide dissolutionJournal article10.1016/j.mee.2024.112304WOS:001392636300001OXIDATION