Soethoudt, JobJobSoethoudtGrillo, FabioFabioGrilloMarques, EstebanEstebanMarquesVan Ommen, RuudRuudVan OmmenHody, HubertHubertHodyDelabie, AnneliesAnneliesDelabie2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34041Surface diffusion for defect mitigation during area-selective deposition of RuMeeting abstract