Thermal conductivity of underlayers for EUV lithography and its effect on sensitivity of metal oxide resist

Fallica, RobertoRobertoFallicaDe Simone, DaniloDaniloDe SimoneHopkins, Patrick E.Patrick E.HopkinsJones, AndrewAndrewJonesGaskinsc, JohnJohnGaskinsc2025-07-312025-07-312025978-1-5106-8634-20277-786XWOS:001517286200041https://imec-publications.be/handle/20.500.12860/45977Thermal conductivity of underlayers for EUV lithography and its effect on sensitivity of metal oxide resistProceedings paper10.1117/12.3051713978-1-5106-8635-9WOS:001517286200041