Redzheb, MuradMuradRedzhebArmini, SilviaSilviaArminiOkudur, Oguzhan OrkutOguzhan OrkutOkudurVanstreels, KrisKrisVanstreelsBernstorff, SigridSigridBernstorffVoort, Pascal Van DerPascal Van DerVoortBaklanov, MikhaïlMikhaïlBaklanov2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27200Gemini-templated PMO low-k filmsMeeting abstract