Observation of the stacking faults in In.53Ga.47As by electron channeling contrast imaging

Hsu, BrentBrentHsuHan, HanHanHanSimoen, EddyEddySimoenMerckling, ClementClementMercklingEneman, GeertGeertEnemanMols, YvesYvesMolsCollaert, NadineNadineCollaertHeyns, MarcMarcHeyns2021-10-272021-10-2720191862-6300https://imec-publications.be/handle/20.500.12860/33170Observation of the stacking faults in In.53Ga.47As by electron channeling contrast imagingJournal articlehttps://onlinelibrary.wiley.com/doi/abs/10.1002/pssa.201900293