New SPM concept for accurate and repeatable tip positioning

Duriau, EdouardEdouardDuriauClarysse, MarcMarcClarysseMoussa, AlainAlainMoussaVanhaeren, DanielleDanielleVanhaerenEyben, PierrePierreEybenHantschel, ThomasThomasHantschelVandervorst, WilfriedWilfriedVandervorst2021-10-172021-10-1720090167-9317https://imec-publications.be/handle/20.500.12860/15253New SPM concept for accurate and repeatable tip positioningJournal article