The relation between phase formation and onset of thermal degradation in nano-scale CoSi2-polycrystalline silicon structures

Van Dal, MarkMarkVan DalJawarani, D.D.Jawaranivan Berkum, J.G.M.J.G.M.van BerkumKaiser, M.M.KaiserKittl, JorgeJorgeKittlVrancken, ChristaChristaVranckende Potter de ten Broeck, MurielMurielde Potter de ten BroeckLauwers, AnneAnneLauwersMaex, KarenKarenMaex2021-10-152021-10-152004-12https://imec-publications.be/handle/20.500.12860/9720The relation between phase formation and onset of thermal degradation in nano-scale CoSi2-polycrystalline silicon structuresJournal article